A semitransparent nanomesh Cu electrode on a polyethylene terephthalate (PET) substrate using metal transfer from a polydimethylsiloxane (PDMS) stamp and nanoimprint lithography is reported. A nanoscale dense mesh pattern is replicated by using a high modulus PDMS stamp. It is found that a uniform pressure of 30 psi and a temperature of 100 degrees C are needed for the transfer of the Cu mesh structure from the PDMS stamp onto the PET substrate. A fabricated semitransparent Cu electrode exhibits high transmittance in the visible range and good electrical conductivity. The authors show that the transmittance is increased by reducing the linewidth of the mesh pattern and an average transmittance of 75% is achieved. An organic light emitting diode on a flexible substrate is fabricated to demonstrate the potential use of a semitransparent Cu electrode as a transparent conducting electrode. (C) 2007 American Vacuum Society.