This article presents simulation and experimental results of an angle-filtered backscattered electron (BSE) technique in the scanning electron microscope (SEM). Simulation results predict that for an incident primary beam energy of 5 keV, BSEs with low emission angles (90 degrees-91 degrees) contain scattering information coming mostly from within 2 nm below the specimen surface. A buried layer track is tested with a 10 keV primary beam inside a normal SEM. The BSE image at low emission angles (between 90 degrees and 91 degrees) provides only surface contamination details while the buried layer is not present. This result indicates that the low emission angle BSEs can be used for surface sensitive imaging. (c) 2007 American Vacuum Society.