In this work, we establish the potential of a UV-promoted direct attachment of alkanes with alcohol and thiol linkers to the silicon (100) surfaces for use in molecular electronic devices with increased potential for integration with existing CMOS technologies. Characterization of the self-assembled monolayers via Fourier transform infrared spectroscopy, spectroscopic ellipsometry, and X-ray photoemission spectroscopy shows that the films assembled on the Si (100) are comparable in quality, aliphatic monolayer coverage, and extent of substrate oxidation to those assembled on the more extensively studied Si (111) crystal face. Simple Si (100)-based electronic devices fabricated with the monolayers exhibited molecule-dependent electrical characteristics. These data highlight the effectiveness of the assembly on Si (100), the ability to fabricate enclosed Si (100)-based molecular devices, and the potential for the future integration of these devices with more conventional technologies.