This work investigates the microstructural changes-especially in grain boundary structure and grain orientation distribution-in CdTe thin films deposited by close spaced sublimation at low (LT) and high temperatures (HT) and submitted to a CdCl2 heat treatment. These changes are quantitatively described by microtexture analysis, a spatial distribution of the orientation of the grains. The analysis is performed in a scanning electron microscope by means of identification of the electron back-scattered diffraction patterns from individual grains. The texture of each grain, the misorientation between grains, and coincident site lattice boundary maps are obtained. The results show that the CdCl2 treatment did not promote significant microstructural changes in HT-CdTe films, which grow with large and randomly oriented grains, and with a predominance of high-angle boundaries. On the other hand, for LT-CdTe films, this treatment promotes a substantial increase in grain size, a decreasing of preferential orientation, and an increase in the number of CSL and high-angle boundaries. These changes are considered to be a strong evidence for recrystallization.