TiO2 thin films with a monophasic anatase structure were synthesized via a high-pressure crystallization (HPC) process which successfully lowered the crystallization temperature of TiO2 films from 350 to 150 degrees C. The thermal budget and energy consumption during the crystallization process were markedly reduced and dense films without cracks were obtained. During the HPC process, crystallization took place throughout the films and TiO2 films with uniform crystallinity were obtained. The HPC process also led to an enhancement in the wettability of TiO2 thin films. The hydrophilicity of the films increased with heating temperatures via high-pressure annealing. In comparison with the conventional annealing, the HPC process not only produced TiO2 films with superior photo-induced super-hydrophilicity, but also led to higher photocatalytic activity of the films. The HPC process was confirmed to provide a new route for synthesizing well-crystallized anatase TiO2 thin films with high photocatalytic activity and good wettability at low temperatures. (C) 2007 Elsevier B.V. All rights reserved.