We present nanoscale decal transfer lithography (DTL) in which the conventional poly(dimethylsiloxane) (PDMS) stamp is alternated with a reusable PDMS-coated nanoscale stamp. Owing to the PDMS thin layer coating strategy, we were able to promote the capability of conventional DTL. First, we succeeded in progressing toward a DTL process that extends to the nanometer scale. Second, we were able to empower the DTL stamp to be used several times.