Recently a new type of lithium niobate waveguide was suggested for potential nonlinear optic applications. The waveguide consists of a uniform large core and a leaky coupled slab for realizing a lateral optical confinement to support the fundamental spatial mode propagation. Inside the waveguide, the slab layer is required to have a refractive index slightly lower than that of the core, but higher than that of the substrate. Lithium niobate doped with magnesium oxides shows an increased refractive index that is dependent on the dopant's concentration. Therefore, in order to fabricate such waveguides, the pulsed laser deposition approach was used to study the growth of such composition-modified lithium niobate as the slab layer. The as-grown films were characterized on its expitaxy, structure, and optical performance, via X-ray diffraction analysis, optical guiding experiment, etc. (c) 2007 Elsevier B.V. All rights reserved.