Thick films containing ultrafine multilayer structures of two complex metal oxides are grown with a single, sectored target in conjunction with pulsed laser deposition on stationary or moving templates. This process is demonstrated with the high-temperature superconductors YBa2Cu3Oy and EuBa2Cu3Oy,. Multilayer periodicities (see figure) as low as 5.5 nm (approximately five unit cells) are obtained in thick films (1.84 mu m approximate to 335 bilayer pairs) with improved superconducting properties.