SiC/SiO2 nanocomposite coating was deposited by electron beam-physical vapor deposition (EB-PVD) through depositing SiC target on preoxidized 316 stainless steel (SS) substrate. High melting point component C remained and covered on the surface of ingot after evaporation. When SiC ingot was reused, remaining C had an effect on the composition, hardness and emissivity of SiC/SiO, nanocomposite coating. The composition of ingot and coating was studied by X-ray photoelectron spectroscopy (XPS). The influence of remaining C on hardness and spectral normal emissivity Of SiC/SiO2 nanocomposite coating was investigated by nanoindentation and Fourier transform infrared spectrum (FTIR), respectively. The results show that remaining C has a large effect on hardness and a minor effect on spectral normal emissivity of SiC/SiO2 nanocomposite coating. (c) 2007 Elsevier B.V. All rights reserved.