Ytterbium silicate (Yb2SiO5) is a promising environmental barrier coating material for SiC-based ceramic matrix composites. Yb2SiO5 powders were prepared by the sol-gel process using tetraethyl orthosilicate and ytterbium nitrate as starting materials. The Yb2SiO5 gel was characterized by Fourier transform infrared spectroscopy (FTIR) and thermogravimetric analysis-differential scanning calorimetry (TGA-DSC). After calcining the gel at 1200 degrees C for 1 h, Yb2SiO5 powders were obtained, which were examined by X-ray diffraction, FTIR, transmission electron microscope, and scanning electron microscope. The results showed that single-phase Yb2SiO5 powders of 200-300 nm in size were successfully synthesized.