화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.90, No.12, 3800-3803, 2007
Surface composition and imprint in CSD-Based PZT films
Reports on PZT films often suggest the contradicting presence of Pb-deficient pyrochlore (Py) and a Pb-rich layer on the surface. We show that standard Ar+ ion sputtering X-ray photoelectron spectroscopy (XPS) depth profiles of PZT films artificially exhibit a Pb-rich surface, independent of actual Pb content of the chemical solution deposition solution. However angle-resolved XPS measurements reveal that films derived from solutions with 10% Pb excess, which give rise to Py surface grains, actually have the expected Pb-deficient surface layer. Alternatively, films derived from solutions with 30% Pb excess are Py free and have Pb-rich surface layer. The Pb-rich films show an increased imprint effect with increasing Pb content.