정전분무법을 이용한 YSZ 박막 제조

권병완; 김진수; 박정훈; Byeongwan Kwon; Jinsoo Kim; Jung Hoon Park

Journal of the Korean Industrial and Engineering Chemistry, Vol.19, No.1, 117-121, February, 2008

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정전분무법을 이용한 YSZ 박막 제조

Preparation of Thin YSZ Film by Electrostatic Spray Deposition

권병완, 김진수 ^†, 박정훈 ¹

경희대학교 환경ㆍ응용화학대학
¹한국에너지기술연구원 화석에너지 환경연구부

Byeongwan Kwon, Jinsoo Kim^†, and Jung Hoon Park¹

College of Environment & Applied Chemistry, Kyunghee University, Gyeonggi-do 449-701, Korea
¹Fossil Energy & Environment Research Department, Korea Institute of Energy Research, Daejeon 305-343, Korea

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초록

본 연구에서는 정전분무법을 이용하여 YSZ 박막을 제조하였다. 제조된 박막은 제조시 전구체 용액, 지지체 온도 등에 크게 영향을 받았으며, 특히 지지체 온도가 400 ℃일 때 치밀한 YSZ 박막을 형성할 수 있었다. 최적조건 하에서 정전분무법을 활용하면 약 12 μm/h의 속도로 치밀한 YSZ 박막을 형성할 수 있었다. 제조된 박막은 XRD, FE-SEM, EDX 등을 이용하여 분석하였다.

In this study, thin YSZ film was prepared by electrostatic spray deposition. The morphology of thin film was strongly influenced by precursor solution and substrate temperature. Especially, dense YSZ film was obtained at the substrate temperature of 400 ℃. The YSZ film growth rate was 12 μm/h at the optimum conditions. Product film was characterized by XRD, FE-SEM and EDX.

Keywords:YSZ;thin film;electrostatic spray deposition;SOFC;electrolyte

[References]

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Dyukov VV, Kuznetsova SA, Borilo LP, Kozik VV, Russ. J. Appl. Chem., 74, 1636 (2001)

[Referenced By]

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[1] Komarneni S, Abothu IR, Rao AVP, J. Sol-Gel Sci. Technol., 15, 263 (1999)

[2] Alemany LJ, Banares MA, Pardo E, Martin F, J. Adv. Oxid. Tech., 3, 155 (1998)

[3] Cheong CW, Park SH, Song KC, Lee HH, Oh SC, Dong JK, Cha YY, Byun TG, HWAHAK KONGHAK, 40(6), 741 (2002)

[4] Estell TH, Flengas SN, Chem. Rev., 70, 339 (1970)

[5] Minh NQ, J. Am. Ceram. Soc., 76, 563 (1993)

[6] Sasaki H, Yakawa C, Otoshi S, Suzuki M, J. Appl. Phys., 74, 4608 (1993)

[7] Meng G, Cao C, Yu W, Peng D, de Vries K, Burggraaf AJ, Key Eng. Materials, 61, 11 (1991)

[8] Wang LS, Barnett SA, Solid State Ion., 61, 273 (1993)

[9] Wang HB, Xia CR, Meng GY, Peng DK, Mater. Lett., 44, 23 (2000)

[10] Dyukov VV, Kuznetsova SA, Borilo LP, Kozik VV, Russ. J. Appl. Chem., 74, 1636 (2001)