화학공학소재연구정보센터
Journal of Industrial and Engineering Chemistry, Vol.13, No.6, 1023-1028, November, 2007
Preparation of Self-Assembled Monolayers in scCO2 and Their Application to Fabrication and Patterning of Polymer Thin Films
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A thin film of polymer was fabricated on functionalized silicon wafer through self-assembled monolayers (SAMs) of perfluorophenyl azide derivatives (PFPA-silane) with covalent bonds by photochemical reaction. The SAMs were formed in supercritical carbon dioxide (scCO2), and the immobilization of polymers was performed by UV irradiation. The results indicate that scCO2 is a good solvent for silylation reactions, better than common organic solvent such as toluene. Compared with the optimum conditions for silylation, reactions are faster and optimum concentration of PFPA-silane is lower in scCO2. The SAMs formed in scCO2 are more uniform than SAMs formed in toluene. The immobilization of polymers is based on photoreactive azido groups of PFPA-silane which is bound to SiO2 surface via silane anchor. Furthermore, the combination of immobilization chemistry with photolithography, which generated patterned polymer films and hybrid arrays with unique surface topographies is also reported.
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