Solid-State Electronics, Vol.47, No.2, 241-245, 2003
Demonstration of 4H-SiC avalanche photodiodes linear array
4H-SiC visible blind avalanche photodiode (APD) linear arrays have been fabricated and successfully tested. A 40 pixel linear array with only one bad pixel has been demonstrated. The linear arrays show uniform breakdown voltage and low leakage current. The photoresponse and the excess noise factor of 4H-SiC APD pixels have been studied. A very high multiplication gain with very low excess noise factors is reported. (C) 2002 Elsevier Science Ltd. All rights reserved.
Keywords:4H-SiC;avalanche photodiodes;linear arrays;avalanche breakdown;visible blind UV detectors;excess noise factor