화학공학소재연구정보센터
Solid-State Electronics, Vol.44, No.6, 963-967, 2000
Evaluation of transport properties of ozonized poly/mono interfaces in polysilicon emitter bipolar transistors
Temperature-dependent electrical measurements have been performed to determine hole and electron transport properties across the poly/mono interface in polysilicon emitter bipolar transistors. A tunneling probability has been extracted, and the results are correlated with noise parameters.