Synthesis and characterization of ITO nanoparticles were investigated in the present study. To synthesize the ITO nanoparticles flame spray pyrolysis was introduced. The average particle diameter increased with an increase in the molar concentration of the precursor. Raising the maximum flame temperature by controlling the gas flow rates also led to an increase in the average diameter of the particles. The crystalline ITO nanoparticles were synthesized, and their average primary particle diameters ranged from 11 to 20 nm. ITO thin films were prepared with a sol consisted of the ITO nanoparticles and a polymer binder. Effect of average particle diameter of the ITO nanoparticles on the transparency and the surface resistance of the ITO thin films were measured. As the average particle diameter increased, the transparency and the surface resistance decreased from 92 to 83% and from 1.0 x 10(4) to 0.8 x 10(4)Omega/square, respectively. (c) 2005 Elsevier B.V. All rights reserved.