We first report on the fabrication of all solid-state thin-film battery (TFB) using a LiNiO2 cathode. The LiNiO2 film is grown by radio frequency magnetron reactive sputtering using a synthesized LiNiO2 target in a [O-2/(Ar + O-2)] ratio of 0.1. The LiNiO2 is then rapid thermal annealed at 700degreesC for 10 min in an oxygen atmosphere. X-ray diffraction results show that the as-deposited amorphous LiNiO2 becomes crystallized when rapid thermal annealed at 700degreesC. It is shown that the TFB made with the rapid thermal annealed LiNiO2 cathode (1.13 mum thick) exhibits fairly stable cyclability with a capacity of 60 muAh. These findings indicate that the rapid thermal annealed LiNiO2 can be a promising cathode material for the fabrication of high performance TFBs. (C) 2002 The Electrochemical Society.