The growth of cuprous benzotriazole films (CuBTA), formed on Cu monocrystals and vapor deposited films under controlled potential conditions ( +0.040 V-SHE) in 1 M NaCl + 5.6 x 10(-3) M 1-H benzotriazole, has been studied by measurement of electrical charge. Film growth follows a direct logarithmic relationship to similar to25 nm thickness and effects of crystallographic orientation are insignificant. Variations in film growth under similar test conditions are attributed to variations in the randomness of CuBTA polymers in the film. A limiting film thickness is predicted, after which slow dissolution occurs without further thickening.