Thin CdTe films of 4-6 cm(2) each were quasi-continuously deposited in a series of up to 10 experiments onto CdS/ITO/glass substrates at 85 degrees C in a membrane cell housing a four electrode assembly, The Cd and Te split anodic currents were regulated by an automatic current control unit connected to a potentiostat. The anolytic compartment with the less noble Cd electrode was separated by a cation exchange membrane from the catholytic compartment containing the other electrodes. Anolyte and catholyte were aqueous solutions of triethanolamine and different amounts of [Cd(TEA)](2+) and TeO32-. Depositions were carried out for 45-90 min at a potential of -1050 mV vs. see (45 degrees C). As-deposited layers contained finely grained polycrystalline cubic and hexagonal CdTe. Thermal annealing at 400 degrees C in air and subsequent etching in K2Cr2O7/H2SO4 and N2H4 . H2O yielded cubic CdTe with a Te-rich surface according to x-ray diffraction and Raman scattering investigations. Au/CdTe/CdS/ITO test structures exhibited weak photoactivity.