Highly crystalline ferroelectric polymer films [vinyidene fluoride and trifluoroethylene, beta-P(VDF-TrFE), 260-15 nm thick] were characterized with FTIR reflectance-transmission microspectroscopy (FTIR-RTM) mapping technique (400 pm x 400 mu m spatial resolution). The amorphous and crystalline fractions were identified locally. FTIR-RTM maps (1 cm(2) area) provided a unique in-depth view of the ultrathin films. Lower film thickness suppressed growth of the crystalline phase. Increased content of amorphous phase lead to non-uniform films with degraded ferroelectric behavior.