Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100degreesC. The In content ranged from 5 to 50 cation-%. The highest conductivity, sigma = 2 000 Omega(-1) . cm(-1) with mu = 25 cm(2).V-1 . s(-1), was found at approximate to 50% In content with a visible transmittance greater than 80%. The (00l) layer spacing increased from approximate to2.6 to 2.85 Angstrom as the In content increased from 5 to 50%.