A versatile, vacuum-ultraviolet-assisted macroscopic fabrication of hexagonally arranged Ag-nanoparticle arrays with controlled periodicity by using phase-segregated amphiphilic diblock copolymer films as templates is demonstrated on either flexible or rigid substrates. After Ag+ is selectively incorporated into the formed hydrophilic nanocylinders, both the photoreduction of Ag+ and a concomitant etching of the copolymer template are achieved by applying a 172 nm photon source (see figure).