화학공학소재연구정보센터
Advanced Materials, Vol.17, No.3, 281-281, 2005
SrZrO3 nanopatterning using self-organized SrRuO3 as a template
Nanopatterned rippled films (see Figure) are produced by epitaxial growth of pulsed-laser deposited SrRuO3 on phototreated surfaces of vicinal SrTiO3 by self-organization in a step-flow inhibited regime. The as-deposited SrRuO3 films are used as nanoscale templates to fabricate arrays of epitaxial SrZrO3 dielectric nanowires.