화학공학소재연구정보센터
Advanced Materials, Vol.16, No.3, 215-215, 2004
Direct writing of patterned ceramics using electron-beam lithography and metallopolymer resists
Patterned arrays of ceramics have been fabricated using electron-beam lithography (EBL) and a metallopolymer resist. Highly ordered arrays of dots, bars (see scanning electron microscopy and time-of-flight secondary ion mass spectrometry images in the Figure), and curved lines rich in Fe and Co are direct-written on films of a highly metallized cobalt-clusterized polyferrocenylsilane. Subsequent pyrolysis leads to ferromagnetic ceramics.