화학공학소재연구정보센터
Advanced Materials, Vol.15, No.2, 149-149, 2003
Patterned microstructures of porous silicon by dry-removal soft lithography
A new procedure to directly pattern a luminescent porous silicon substrate by dry-removal soft lithography is outlined. The ability to transfer a removed microstructure of porous silicon to a free-standing flexible polymer film is also demonstrated, and by removing strips in orthogonal directions, an array of PSi pillars is produced (see Figure).