Previous Article Next Article Table of Contents Advanced Materials, Vol.10, No.17, 1466-1469, 1998 DOI10.1002/(SICI)1521-4095(199812)10:17<1466::AID-ADMA1466>3.0.CO;2-5 Export Citation Fabrication of silicon MOSFETs using soft lithography Jeon NL, Hu JM, Whitesides GM, Erhardt MK, Nuzzo RG [Referenced By] Please enable JavaScript to view the comments powered by Disqus.
