Advanced Materials, Vol.10, No.11, 849-849, 1998
Ultrathin diblock copolymer/titanium laminates - A tool for nanolithography
A self-assembled diblock copolymer mask teamed with conventional ion etching is one approach to nanometer patterning of surfaces. An ultrathin film of polystyrene-black-poly(2-vinylpyridine) on mica is shown to yield isolated, regularly arranged clusters of polystyrene surrounded by a thin Layer of poly(2-vinylpyridine) see Figure. Subsequent selective deposition of a metal film followed by etching results in surface patterning.