Advanced Materials, Vol.9, No.5, 417-420, 1997
Room temperature silicon wafer bonding with ultra-thin polymer films
Bonding of silicon wafers is required in microelectronics fabrication, for example. A room-temperature bonding process that leads to sufficient bond strength is necessary for bonding semi-processed wafers: i.e., those already containing temperature-sensitive structures. The room-temperature bonding of hydrophobic wafers is reported for the first time, an ultra-thin Langmuir-Blodgett film of a ''hairy'' rod-like polymer being used as an intermediate layer. The effect of the polymer layer on the surface roughness is investigated and possible directions of future work are indicated.