화학공학소재연구정보센터
Advanced Materials, Vol.9, No.4, 361-364, 1997
Molecular patterning using two-dimensional polymer Langmuir-Blodgett films
Research News: Langmuir-Blodgett (LB) films for high-resolution resists for the preparation of integrated circuits with higher densities are reviewed briefly A technique based on the polymerization of monomeric LB films and a newer one based on the two-dimensional cross-linking of a polymeric LB film are described. It is demonstrated that cross-linkable polymeric LB films have the ability to create high-resolution molecular patterning with nanometer (layer) thickness. Examples of patterns produced with such films are presented.