Advanced Materials, Vol.8, No.11, 917-919, 1996
Rapid prototyping of complex structures with feature sizes larger than 20 mu m
A rapid, low-cost technique of microfabrication for feature sizes of 20 mu m or more is described, which is useful for the rapid production of limited numbers of microsensor and optical structures The pattern can be designed on a PC and printed out on transparent films of polymers using a commercial image-setting system. The Figure shows an SEM image of a relief pattern generated on photoresistant film using this method.