화학공학소재연구정보센터
Advanced Materials, Vol.6, No.11, 881-887, 1994
THIN-FILM FABRICATION BY LASER-ABLATION OF ADDITION POLYMERS
Laser ablation can be used to deposit polymer thin films, in addition to its widespread application for the deposition of inorganic materials. The production of polytetrafluoroethylene (PTFE) and polymethylmethacrylate (PMMA) films by evaporation of the solid polymer target with a pulsed UV laser is described. The composition and morphology of the films, the laser-target interaction, and the film characterization are discussed. Finally, possible routes are considered for how the ablation proceeds.