화학공학소재연구정보센터
Advanced Materials, Vol.6, No.7-8, 600-604, 1994
MICROFABRICATION BY MICROCONTACT PRINTING OF SELF-ASSEMBLED MONOLAYERS
Microcontact printing, is described. It offers extreme experimental simplicity and flexibility, relying on the ability of self-assembled monolayers (SAMs) of long-chain alkanethiolates on gold and other metals to act as nanometer resists. The Figure is an electron micrograph of a silicon microstructure resulting from chemical etching of a patterned SAM.