Thermally stabilized channel waveguides with Bragg gratings were fabricated by the space-selective precipitation technique of crystalline Ge nanoparticles using KrF excimer laser irradiation. The periodic structures consisting of Ge nanoparticles were formed in Ge-B-SiO2 thin glass films after exposure to an interference pattern of the laser followed by annealing at 600 degrees C. The channel waveguides with the periodic structures were fabricated by the cladding of the patterned Cr layers on the films. The diffraction peak for the TE-like mode of 11.8 dB depth was observed clearly at a wavelength of 1526.4 nm, indicating that the periodic structure also served as the optical band-pass filter in optical communication wavelength. The spectral shape, diffraction efficiency, and diffraction wavelength remained unchanged even after annealing at 400 degrees C. Furthermore, a low temperature dependence of the diffraction wavelength - as low as 8.1 pm/degrees C - was achieved. The diffraction efficiency was further enhanced after subsequent annealing at 600 degrees C. The space-selective precipitation technique is expected to be useful for the fabrication of highly reliable optical filters or durable sensing devices operating at high temperature. (C) 2007 Elsevier B.V. All rights reserved.