The effect of low energy electron beam irradiation on polycarbonate (PC) film has been studied here. The PC film of thickness 20 mu m was exposed by 10 keV electron beam with 100 nA/cm(2) current density. The irradiated film was characterized by mean of X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and residual gas analyzer (RGA). Formation of unsaturated bonds and partial graphitization of the surface layer are measured by XPS. Results of the AFM imaging shows electron implantation induce changes in surface morphology of the polymer film. The residual gas analyzer (RGA) spectrum of PC is recorded in situ during irradiation. The results show the change in cross-linking density of the polymer at the top surface. (c) 2007 Elsevier B.V. All rights reserved.