The micro-characterization of several surface properties of the solar cells can be accomplished using high-resolution laser beam induced current images. For obtaining these images, a very precise laser beam focusing on the photoactive surface is required. For this purpose, a methodology for obtaining the best focalization associated to the maximum of a peak curve has been developed. In this paper, a data set, obtained from the inner photoconversion properties of the system, has been evaluated with three different numerical analysis techniques: (a) derivative, (b) length and (c) Fourier Transform, in order to get the finest possible peak distribution. Then, an amount of 13 analytical peak curves using the Levenberg Marquardt algorithm to find the best curve that adjusts the data distribution have been analyzed. (c) 2006 Elsevier B.V. All rights reserved.