The boron films were formed from the optimized stable suspension solution of boron particles using electrophoretic deposition technique. The magnesium film with optimized thickness was deposited onto boron films by vacuum evaporation technique. The heterogeneous structure was given heat treatment in ambient and vacuum atmosphere for diffusion of Mg into the boron films to form MgB2 phase. XRD studies were carried out on both as deposited and heat treated heterostructure films to investigate their structure and phase. Surface morphological studies of these films were done by SEM. (c) 2006 Elsevier B.V. All rights reserved.