화학공학소재연구정보센터
Applied Surface Science, Vol.253, No.3, 1046-1050, 2006
XPS studies of short pulse laser interaction with copper
The effect of laser ablation on copper foil irradiated by a short 30 ns laser pulse was investigated by X-ray photoelectron spectroscopy. The laser fluence was varied from 8 to 16.5 J/cm(2) and the velocity of the laser beam from 10 to 100 mm/s. This range of laser fluence is characterized by a different intensity of laser ablation. The experiments were done in two kinds of ambient atmosphere: air and argon jet gas. The chemical state and composition of the irradiated copper surface were determined using the modified Auger parameter (alpha') and O/Cu intensity ratio. The ablation atmosphere was found to influence the size and chemical state of the copper particles deposited from the vapor plume. During irradiation in air atmosphere the copper nanoparticles react with oxygen and water vapor from the air and are deposited in the form of a CuO and Cu(OH)(2) thin film. In argon atmosphere the processed copper surface is oxidized after exposure to air. (c) 2006 Elsevier B.V. All rights reserved.