For modem technology applications it is important to develop non-contact methods of control of the modification of dielectric materials surface layer. The aim of the work is to determine the level of roughness changes in the surface layer of non-metallic material, optical glass BK-7, and to control it by in situ ellipsometry. The probing light spot was formed at a second (lower) reflective surface of the plate being studied during its mechanical processing at direct observation of these changes. The fine mechanical polishing was carried out for 2 hours by using the grinding-polishing machine installed directly on the sample table of ellipsometer LEF-3M. The angle of light incidence was close to 70 degree. The ellipsometric parameters, were determined within the mechanically processed area. For this purpose, the probing light beam passed two times through the sample and then returned to the initial (air) medium, where its polarization state was studied. The polarized beam falls on lower plate surface polished by conventional technology using grinding-polishing CeO2-based instrument "Aquapol" (grain size I micron). The time dependences of the ellipsometric parameters during the surface layer treatment were studied. In these dependences the tendency of changes of ellipsometric parameters indicates the surface roughness enhancement. (c) 2006 Elsevier B.V. All rights reserved.