This research investigates the effect of ion implantation dosage level and further thermal treatment on the physical characteristics of chromium coatings on Si(111) substrates. Chromium films had been exposed to nitrogen ion fluencies of 1 x 10(17), 3 x 10(17), 6 x 10(17) and 10 x 10(17) N+ cm(-2) with a 15 keV energy level. Obtained samples had been heat treated at 450 degrees C at a pressure of 2 x 10(-2) Torr in an argon atmosphere for 30 h. Atomic force microscopy (AFM) images showed significant increase in surface roughness as a result of nitrogen ion fluence increase. Secondary ion mass spectroscopy (SIMS) studies revealed a clear increased accumulation of Cr2N phase near the surface as a result of higher N+ fluence. XRD patterns showed preferred growth of [002] and [111] planes of Cr2N phase as a result of higher ion implantation fluence. These results had been explained based on the nucleation-growth of Cr2N phase and nitrogen atoms diffusion history during the thermal treatment process. (c) 2005 Elsevier B.V. All rights reserved.