Metastable induced electron spectroscopy (MIES) was combined to ultraviolet photoelectron spectroscopy (UPS) to study the initial steps of manganese oxidation. Oxygen exposure directly led to the formation of MnO with no intermediate states. The MnO feature saturation observed by MIES and UPS techniques showed noticeable differences and proved the formation of several oxide layers. The oxidation kinetics was studied by measuring MnO features by UPS, which depend on the surface coverage by oxygen. We observe a decrease of oxygen adsorption probability with oxygen exposure. Oxidation proceeds by oxygen dissolution into the first layers to form a three-dimension MnO. This hypothesis was confirmed by our work function measurements. (c) 2005 Elsevier B.V. All rights reserved.