Iron nitride (FexN) is obtained by the mixing technology with laser and plasma beams coaxially on the surface of pure iron in atmosphere. In this technology, laser and plasma provide heat source and nitrogen ion source, respectively, easily to nitriding the sample. The feasibility of the method is analyzed in theory. Small-angle X-ray diffraction measurements reveal formation of iron nitride in the as-treated sample, and scanning tunneling microscope measurements describe the surface profiles of the irradiated area, at different laser energy densities or different scanning velocities. (c) 2005 Elsevier B.V. All rights reserved.