We have studied interface electronic structure of transition metal film (Fe, Zr)/4H-SiC (substrate) contact systems by using a photoemission electron microscopy (PEEM) and a soft X-ray fluorescence spectroscopy (SXFS). PEEM can show surface micro- and/or nano-structures, whereas SXFS can tell details of chemical bonding states. For specimens of Fe(10 nm)/4H-SiC(0 0 0 I)Si face contact system annealed at 300-900 degrees C, PEEM images have shown dramatic change in surface morphology above 550 degrees C, where the Si L-2,L-3 fluorescence spectra can be explained by considering formation of iron silicides. On the other hand, PEEM images and the Si L-2,L-3 fluorescence spectra for specimens of Zr(film)/4H-SiC(0 0 0 I)Si face contact system annealed at 650-1100 degrees C have indicated that interfaces of specimens are stable up to 1100 degrees C without any reaction. (c) 2004 Elsevier B.V. All rights reserved.