Multicomponent magnetic alloy targets were ablated in vacuum with a XeCl excimer laser at three different fluences. The ablated material was collected onto unheated silicon substrates placed at different angles with respect to the target normal at the incident laser spot. Film composition was inferred by Rutherford backscattering spectrometry analyses. Experimental results reveal that the lighter element concentration is larger in films deposited at higher collecting angle. The observed effect is more evident at lower laser fluences. The dependence of composition variations on the collecting angle in the studied multielemental films are attributed to scattering effects among the ablated species in the plume. (c) 2005 Elsevier B.V. All rights reserved.