Neutron depth profiling (NDP) has been employed to examine manufacturing processes and starting materials for several high-technology applications. NDP combines nuclear and atomic physics processes to determine the concentration profile of several light elements in the near surface region (similar to1-8 mum) of smooth surfaces. The method is both quantitative and non-destructive. Analyses are performed at the Center for Neutron Research at NIST on samples prepared at Coming Incorporated. Two types of samples have been analyzed: (1) Boron profiles are measured in glasses to determine B loss due to its volatilization during manufacturing. Surface depletion of B is a key characteristic of borosilicate materials for both chemical vapor deposition and conventional melting processes. (2) For lithium niobate, a quantitative measure of Li concentration can differentiate congruent and stoichiometric compositions and any surface depletion in commercial wafers. (C) 2004 Elsevier B.V. All rights reserved.