Applied Surface Science, Vol.231-2, 921-925, 2004
SIMION modeling of ion optical effects in Cameca ion microanalyzers: simulation of ion transmission losses
A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f. (C) 2004 Elsevier B.V. All fights reserved.