Microstructural, mechanical and textural state evolution under Kr irradiation have been analysed in 250 and 500 nm sputter deposited 304L stainless steel films using X-ray diffraction measurements. The as-sputtered films are in a high compressive stress state (between 3.2 and 2.4 GPa) and show a fibre texture which nature depends on the film thickness: <110> and <111> for 500 nm thick films and only <110> for 250 nm thick. A 150 nm in depth high fluence Kr2+ irradiation induces a decrease of the in plane stress values and textural modifications in both films; the <110> fibre texture in the 250 nm thick film disappears completely whereas in the 500 nm thick film, the <111> fibre texture is destroyed while the <110> fibre texture is still present. These results confirm the existence of a critical thickness (300 nm) above which a columnar structure with <111> fibre texture takes place during thin film growth. (C) 2004 Elsevier B.V. All rights reserved.