화학공학소재연구정보센터
Applied Surface Science, Vol.210, No.3-4, 158-164, 2003
Local surface cleaning and cluster assembly using contact mode atomic force microscopy
Conventional contact mode atomic force microscopy (AFM) has been used for local surface cleaning and cluster alignment. By using the AFM tip to sweep and push in contact mode, we have demonstrated that Cu clusters, prepared by vacuum evaporation onto Dow Cyclotene 3022 polymer and subsequent exposure to atmosphere, can easily be moved by the AFM tip, and assembled at the outer edge of the scanned region to form a line of clusters. We have found that the force applied by the tip plays an important role in the ease of cluster motion. Cyclotene surface treatment that enhances cluster adhesion hinders this ability, and may be used as a method of nanofabrication. (C) 2003 Elsevier Science B.V. All rights reserved.