Applied Surface Science, Vol.208, 645-650, 2003
New results in pulsed laser deposition of poly-methyl-methacrylate thin films
Thin organic films based on poly-methyl-methacrylate (PMMA) polymer have been obtained by pulsed laser deposition (PLD) on silicon substrates. The films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and Raman spectroscopy (RS). We observed that the film composition and structure depend on the laser fluence and on the temperature of the substrate during deposition. (C) 2002 Elsevier Science B.V. All rights reserved.