Films of M2O3-Sc2O3 were deposited on glass substrates at a temperature of 250 degreesC in an oxygen pressure of 10 mTorr using a pulsed laser deposition technique. Films with Sc2O3 composition varying between 0 and 1.0 wt.% have resistivities varying between 1.85 x 10(-3) Q cm and 2.18 x 10(-1) Q cm and their optical transparencies are more than 80% for wavelengths between 400 and 900 nm. Published by Elsevier Science B.V.