Applied Surface Science, Vol.208, 272-276, 2003
Lowering of the laser crystallization threshold of a-Si : H due to the presence of Si clusters at the surface
We present an experimental evidence of the role of a Si cluster suspended above the surface of a hydrogenated amorphous silicon film (a-Si:H) in the crystallization of the film at a laser energy lower than the laser crystallization threshold of the "flat" surface. The local electromagnetic (EM) field enhancement is interpreted by the role of such a sphere-plane system as a laser intensity amplifier. The enhancement factor determined in this work is in the range of 20-30. (C) 2002 Elsevier Science B.V. All rights reserved.